Advantages :
Price
Small, easy to use, robust
Direct transfer of processes developed on the Pcox200 S to a Pcox20X production machines
Possible and easy evolution of a Pcox200 S module into a Pcox20X machine ensuring long tool life without obsolescence.

Utilisation :
The Pcox20X range presents a series of modular machines which offers configurations including 2, 3 or 4 polishing modules.

The Pcox 200 S is one of these modules used in stand-alone form for process development It offers all the specifications of the production machine :

Complete control by computer and PLC
Automatic loading and unloading of the polishing head
Ten polishing steps
Standard 200 mm
Compatibility 4" to 8"
Ex-situ and in-situ conditioning
Integrated slurry pumps
Unique quick exchange of platen, polishing carriers and conditioning tools.

Its structure offers the same productivity specifications as a module included in a Pcox20X machine although with manual loading of the wafer to save space and cost.